The diffusion furnace that could perform the oxidation process is composed of a furnace frame, a heater, a heating control device, a temperature measure device, a quartz furnace tube, a push-pull carrier tray, some gas path, and an exhaust gas treatment device. The temperature control requirements of this kind of diffusion furnaces are as follows:

Heating Temp Range	Ambient-1100℃	Control Accuracy	±2℃
Max Heating Rate	15℃/min	Temp Uniformity	±0.5℃/760mm
Max Cooling Rate	5℃/min	Stability	±0.5℃/24h

 

The oxidation diffusion furnace generally uses thermocouples inside and outside the furnace to dynamic control the temperature. Each temperature zone is equipped with one inside and one outside thermocouple to ensure the reliability of the temperature control. S type semiconductor thermocouple(common practice utilizes multi-point thermocouple that has 3-9 different spots to grab temperature info) is often chosen to be the inside thermocouple which is used to sense the temperature of silicon wafer directly, and could translate to precise wafer temperature display.

 

 

Duchin Instrument developed types of structures for multi-point thermocouple, multi-point thermocouple calibration equipment for experiments, a type of cold-junction structure formulti-point thermocouple, a type of terminal packaging structure for multi-point thermocouple, types of composite metal protection tube of multi-point thermocouple for oxidation furnace, and other proprietary technologies to meet the requirements of diffusion furnace temperature sensing.The technical parameters of the S type semiconductor thermocouple specialized for photovoltaic equipment are as follows:

Technical Parameters	Internal Thermocouple
Type	S,R
Wire or MIMS Diameter	φ0.35~0.5
Working Temp(℃)	0~1100
Accuracy(℃)	±1.0
Protective Tube Length(mm)	≤4000
Protective Tube Diameter(mm)	φ12~18
Protective Tube Material	Quartz
Hot End Structure	Exposed
Number of Points	3~6 Points
Termination	Small Connector
Compensation Wire	SC-2×0.5FPF
Structure Characteristics	To assemble T/C in combination for each point is quite difficult

 

 

 

 

 

 

 

 

 

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